Keithley 7072-HV 8×12 High Voltage Semiconductor Matrix Card

High Voltage Semiconductor Matrix Card 8×12 The Model 7072-HV is designed to switch low-level, high-voltage, and high-impedance signals for semiconductor parametric tests on wafers and devices. This unique design provides two signal paths capable of switching 1300V with less than 1pA of offset current. The two C-V paths may be used for measurement of capacitance voltage  characteristics from DC to 1MHz or for switching low currents with a common ground. Four additional high quality signal paths with less than 20pA offset current provide for signal  switching to 200V. Connections are 3-lug triax with the outer shell connected to chassis for safety and noise shielding. The center conductor is fully surrounded by the inner conducting shield to provide fully guarded measurements with higher isolation and improved meas ure ment speed and accuracy.

Click to enlarge image Row Connections and Backplane Expansion

7072-HV Applications

The Model 7072-HV, in con junc tion with the Model 237 SMU, 2410 SourceMeter® instrument, Model 6487  Picoammeter/Voltage Source, or Model 6517B Electrometer/High Resistance Meter, can address a wide variety of semiconductor device and material char ac teri za tion needs.The high voltage signals en coun tered in break down mea sure ments or oxide integrity testing can be easily switched with this matrix card. Signals connected to the High V, Low I paths are automatically isolated from the rest of the card.

For applications requiring connections to a large number of devices or test points, the 7072-HV matrix can be expanded with additional cards. The high voltage and C-V rows can be extended to other cards with coaxial jumpers. The other four high-quality signal paths connect directly to the 707A or 708A backplane for expansion.